Authors: Terzaki, N. Vasilantonakis, A. Gaidukeviciute, C. Reinhardt, C. Fotakis, M. Vamvakaki, and M. Farsari
We report the 3D structuring and metallization of a zirconium-based organic-inorganic photosensitive material doped with metal-binding tertiary amine moieties. The influence of the amine group content on the material structurability, the structure resolution and the metallization efficiency was examined. The silver plating technique was also optimized by investigating the metal seeding and reduction parameters. We have compared the silver plating vs. the metal bath techniques and we have found that while the metal bath technique gives good quality metal coatings, ohmic conductivity can only be obtained by silver plating.
©2011 Optical Society of America
OCIS codes: (350.3390) Laser materials processing;(160.3918) Metamaterials; (160.6060) Solgel; (160.1245) Artificially engineered materials.